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Evgeni Gusev (Editor), Eric Garfunkel (Editor), Arthur Dideikin (Editor):

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics) - pocketboek

2012, ISBN: 9789048138050

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CL Engineering/Cengage Learning India, 2012. 2nd edition. Softcover. New. This text by Shetty and Kolk, blends the pertinent aspects of mechatronicssystem modeling, simulation, sensors,… Meer...

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Eric Garfunkel, Evgeni Gusev, Arthur Dideikin:

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2010, ISBN: 9048138051

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and ActuatorsEinbandHardbackAutor(en)Gusev, Evgeni; Garfunkel, Eric; Dideikin, ArthurVerlagSpringer NetherlandsAusgabe2… Meer...

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Gusev, Evgeni|Garfunkel, Eric|Dideikin, Arthur:
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators - gebonden uitgave, pocketboek

2010

ISBN: 9048138051

[EAN: 9789048138050], Neubuch, [PU: Springer Netherlands], NANOTECHNOLOGIE TECHNOLOGIE CMOS INTEGRATEDCIRCUIT METAL MICROELECTROMECHANICALSYSTEM(MEMS) SEMICONDUCTOR SENSOR STATIC-INDUCTIO… Meer...

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Advanced Materials and Technologies for Micro/Nano-Devices Sensors and Actuators - pocketboek

2010, ISBN: 9789048138050

Advanced Materials and Technologies for Micro/Nano-Devices Sensors and Actuators ab 298.49 € als gebundene Ausgabe: Auflage 2010. Aus dem Bereich: Bücher, Wissenschaft, Technik, Medien > … Meer...

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Advanced Materials and Technologies for Micro/Nano-Devices Sensors and Actuators - pocketboek

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Advanced Materials and Technologies for Micro/Nano-Devices Sensors and Actuators

The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.

Gedetalleerde informatie over het boek. - Advanced Materials and Technologies for Micro/Nano-Devices Sensors and Actuators


EAN (ISBN-13): 9789048138050
ISBN (ISBN-10): 9048138051
Gebonden uitgave
pocket book
Verschijningsjaar: 2010
Uitgever: Springer Netherlands
314 Bladzijden
Gewicht: 0,639 kg
Taal: eng/Englisch

Boek bevindt zich in het datenbestand sinds 2008-07-06T08:48:47+02:00 (Amsterdam)
Detailpagina laatst gewijzigd op 2023-10-27T12:13:51+02:00 (Amsterdam)
ISBN/EAN: 9048138051

ISBN - alternatieve schrijfwijzen:
90-481-3805-1, 978-90-481-3805-0
alternatieve schrijfwijzen en verwante zoekwoorden:
Auteur van het boek: guse, garfunkel
Titel van het boek: nano, actuator, sensors and actuators, series advanced


Gegevens van de uitgever

Auteur: Evgeni Gusev; Eric Garfunkel; Arthur Dideikin
Titel: NATO Science for Peace and Security Series B: Physics and Biophysics; Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Uitgeverij: Springer; Springer Netherland
314 Bladzijden
Verschijningsjaar: 2010-03-15
Dordrecht; NL
Gedrukt / Gemaakt in
Taal: Engels
213,99 € (DE)
219,99 € (AT)
236,00 CHF (CH)
POD
XI, 314 p.

BB; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Materialwissenschaft; Verstehen; CMOS; integrated circuit; metal; microelectromechanical system (MEMS); semiconductor; sensor; static-induction transistor; Metals and Alloys; Control, Robotics, Automation; Electronics and Microelectronics, Instrumentation; Microsystems and MEMS; Classical Mechanics; Regelungstechnik; Elektronik; Klassische Mechanik; BC

MEMS/NEMS Technologies and Applications.- History of Early Research on MEMS in Russia (U.S.S.R.).- Challenges of Complete CMOS/MEMS Systems Integration.- MEMS for Practical Applications.- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device.- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU.- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors.- Monocrystalline-Silicon Microwave MEMS Devices.- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites.- MEMS Device and Reliability Physics.- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams.- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS.- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches.- Advanced Processes and Materials.- Development of DRIE for the Next Generation of MEMS Devices.- Low-Temperature Processes for MEMS Device Fabrication.- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications.- 3D Integration of MEMS and IC: Design, Technology and Simulations.- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices.- Modeling of Dry Etching in Production of MEMS.- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures.- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys.- Sensors.- Smart Sensors: Advantages and Pitfalls.- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents.- Integration of Diverse Biological Materials in Micro/Nano Devices.- Force Sensing Optimization and Applications.- Using ParametricResonance to Improve Micro Gyrsocope Robustness.
State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies Broad coverage from technology fundamentals all the way to device applications Includes supplementary material: sn.pub/extras

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